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Structural Stoichiometry and Phase Transitions of MoO3 Thin Films for Solid State Microbatteries

Author Affiliations

  • 1Department of Physics, Andhra Loyola College, Vijayawada - 520 008, INDIA
  • 2 Department of Physics, Maris Stella College, Vijayawada - 520 008, INDIA
  • 3 Department of Physics, Engineering College Bikaner, Bikaner – 334004, INDIA

Res. J. Recent Sci., Volume 2, Issue (4), Pages 67-73, April,2 (2013)


MoO3 is a potential material because of its wide range of stoichiometry with interesting behaviour, which includes chromogenic and catalytic properties. This leads to the applications in electrochromic display devices, optical memories, gas sensors and lithium batteries. The substochiometric films MoO3-x with oxygen deficient contain excess metal atoms which act as doping centers; these centers control the electrical and optical film properties. The orthorhombic phase (α-MoO3) has a layered structure, which consists of double layers of MoO6 octahedra held together by covalent forces in the (100) and (001) directions but by Van der Waals forces in the (010) direction. There are several approaches to prepare MoO3 thin films including sputtering, chemical vapor deposition, electro-deposition and evaporation. In particular, chemical vapor deposition has been regarded as a suitable technique which could induce a homogeneous thin film using vaporized phases. Crystalline molybdenum oxide presents either an orthorhombic structure (α-phase) or a monoclinic structure (β-phase) of the perovskite-like type; both structures are essentially built up of corner-sharing MoO6 octahedra. A layered oxygen deficient orthorhombic MoO3 (α-phase) and monoclinic MoO3 (β-phase) are found to exhibit optical switching upon thermal, photo or electric excitations. This optical modulation (colouration/bleaching) is effectively used in many applications like smart windows, anti dazzling coatings and display devices. Thus the synthesis of large area Mo-oxide thin films by an economical route and the structure tailoring of deposited material for the end application seems to be of prime importance. This paper deals with the detailed technological aspects of properties, different structures of MoO3 for the fabrication of all solid state lithium ion batteries with wide applications of MoO3 films as electrochromic display devices and gas sensors.


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