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Optical Properties of Vacuum Evaporated WO3 Thin Films

Author Affiliations

  • 1Department of Physics, Andhra Loyola College, Vijayawada – 520008, INDIA
  • 2Thin Film Laboratory, Department of Physics, Sri Venkateswara University, Tirupati – 517 502, INDIA

Res.J.chem.sci., Volume 1, Issue (7), Pages 76-80, October,18 (2011)


Thin films of WO3 were prepared by vacuum evaporation technique in the temperature range 303-603 K. The deposition parameters such as substrate temperature, deposition rate, film –substrate combination, vacuum during the film deposition were controlled. The influence of substrate temperature on the optical properties of WO films has been studied in the wavelength range 300-1600 nm. The optical band gap is found to be dependent of the deposition temperature and decreased from 3.18 to 2.90 eV with increase of deposition temperature from 303 to 503 K. The effect of heat treatment in air (calcination) on the optical properties of the films is also reported.


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